1、半导体知识厂务讲座 (HOOK UP 简介) 1Secondary process system introductionWorking characteristics1. Wafer factory2. Fab features and capabilities of the gas required3. Chemical substances and their properties required for fab4. Work contents1. Wafer factoryFAB is a modern plant producing chips, the main workplac
2、e for the cleanroom. Clean room is a constant temperature and humidity, temperature is 21 c. Relative humidity 65%. Fab clean rooms divided into the diffusion zone (furnace batch), yellow, etching, thin film areas. 2. Fab features and functionality of the gas requiredDue to the manufacturing process
3、 on the need and use of many kinds of gases in semiconductor factories. We generally are based on gas properties to distinguish words. Specialty gases and gas can be divided into two broad categories. The former to use less gas. Such as SiH4, andNF3 . Which use large amounts of gas. Such as N2, andC
4、DA . Due to a larger amount; General gas often in “ bulk gas “ call. The Bulk Gas. Specialty gas -Specialty Gas. 2-1 Bulk GasIn the semiconductor manufacturing process, need to provide a variety of high purity gas used in pneumatic equipment power, chemicals or pressure medium is used as an inert en
5、vironment, or take part in the reaction or to remove impurities, such as different 半导体知识厂务讲座 (HOOK UP 简介) 2functions.Because of increasingly sophisticated semiconductor production, its requests for gas purity is ever mentioned. Semiconductor factory will be briefly described below the general qualit
6、y requirements and the necessary equipment for gas and its functions.2-1-1Bulk gas products:Bulk gas Semiconductor plants can use, there are generally CDA 、 GN2 、 PN2 、 PAr 、 PO2 、 PH2 、 PHe 7 Species. 2-1-2 Bulk gas manufacturing:CDA/ICA(Clean Dry Air)Clean, dry air.CDASources taken from the air co
7、mpressed by compressor dehumidifier, then by a filter or activated carbon adsorption to remove dust and hydrocarbons to supply the clean room CDA/ZCD 。 CDA System:Air compressor Buffer storage tank cooling dryerFilter CDAGN2Compressed using compressor cooling gas into liquid gas. Catalytic converter
8、, CO reaction to CO2, H2, reaction to H2O, then sieve absorption of CO2, andH2O And then slip separation O2 SWG ; Welding7-6. Operating temperature, Cost8. Two-disc set of the form:In general have the following common forms:Specialty Gas(No disk group, VMB/VMP Replace)Bulk GasEPLevel by the Diaphrag
9、m Valve+Regulator+Gauge+Filter CompositionBALevel by the Ball Valve+Regulator+Gauge CompositionNote: close the secondary disk group when piping Parts Structures will not be finalized after discussions with the owner. Construction specifications1. Piping erection半导体知识厂务讲座 (HOOK UP 简介) 172. Bends tubi
10、ng specifications3. Pipe cutting and milling surfaces4. Installation of pipe joints5. Specification for welding6. CHEMICAL HOOK-UP specifications1. Piping erection1-1 Prefabrication work environmentTo be equipped with a temporary clean Studio (Clean Booth) And all piping work operation within this a
11、rea basically completed, in order to avoid undue pollution. This clean Studio and control must be maintained in the following environmental conditions:Temporary clean Studio:a. Number of dust (static, particles smaller than 0.3um ) 1um=0.001mm :(Human hair100um)Warehouse : (Disc used for storing mat
12、erials and prefabricated, fittings, etc)The cleanliness is Class 10000 。 Class 10000 Clean Booth measured the amount of particles (0.1um particles above) cannot exceed10000 PCS/c.fCutting work areas : Class 1000 For cutting tubes, assembled disc, and so on. Welding work area : Class 100 For weld, pr
13、efabricated pipe fittings. b. Maintain clean conditions:Welding work area, the temperature 21C Relative humidity 65% 。 半导体知识厂务讲座 (HOOK UP 简介) 18c. Airflow:Cycles per hour 5-10 d. The environment:This Studio to maintain positive pressure environment 30Pa, Enough to block particles, grease and other f
14、oreign matter. e. Work in this area must be dressed in clean clothes, shoes and PVC Gloves. When the number of particles overweight, should reduce the number of clean room or replace MEPA Filters do test again, until it reaches the standard before starting work. 1-2 Prefabricated (in a simple clean
15、room clean booth )1-2-1 RongRong solution automatically, if the pipe diameter is greater than 20A According to Rong is required. Rong occasions, prior to construction to determine persons need to be performed by a qualified BACK SHIELD Compliance gas flow and purity requirements. Rong is confirming
16、that two sections of piping treatment compliance, and distribution centers.Rong Shi 镕 intake should be less than the thickness of the pipe 1/3 。 Rong interval according to tubing size, but ordinary by equally spaced around the implementation.半导体知识厂务讲座 (HOOK UP 简介) 19Fake film, identified Rong Rong t
17、o clean surfaces after acidification with the flat surface of piping.When using automated Rong Rong, under the same conditions, be in the real Rong samples to determine without any problems.Rong location 4 Point or 6 1-2-2. Chong-blown gas (Back seal gas)Using argon gas dew point -80C Or lower, the
18、oxygen content in the 0.1ppm Here, particles ( 0.1um More) content is zero. 1-2-3. Rush blow tubes for sleeveConnecting impulse gas pipelines and erecting the pipeline using ( Back seal jig )As shown in figure (a) showsFigure (a)1-2-4.Set up procedure (figure II)Will work on the both ends of the pip
19、e sleeve tubing, connect flushing gas and valve1-2-5.EncapsulatedAfter completing the welding, tube full Ar Gas, and wrapped with plastic dust-free paper at the end of two layers. If the valve is connected at the end of the, wrapping paper with plastic valve. 半导体知识厂务讲座 (HOOK UP 简介) 201-2-6.Storage a
20、nd handlingMaterials must be placed in a special storage, on site or in the material to provide a temporary simple clean room, all material should be placed in order. In-store materials, electronic polished fittings must be separated and without electronic polished fittings. When not using fitting p
21、lastic wrappers should not be opened until until the site can be opened only when you want to use, and materials should not be placed directly on the ground. 1-3 Site welding1-3-1 Spot welding personnel must be trained in identification of high purity piping technique adopted.Reset the scene intact.
22、The pipe being welded tube removed and connect Back seal gas 。 Rush blows clean welding pipe end Back seal gas Removed, and start welding. 1-3-2 Pipeline maintenance conditionsEven if weld ends, also want to maintain a small N2 Ar Tube, rushed to prevent air blowing into the tube. 1-4 Pipe fixing1-4
23、-1 Plumbing fixtures not burden with the construction on the piping.1-4-2.Construction plumbing is not the correct angle in combination is not available to support correct.1-4-3.Piping connecting section (Rong) cannot set support.1-4-4.Construction of pipe supports must be in accordance with the 半导体
24、知识厂务讲座 (HOOK UP 简介) 21design basis.1-4-5. U Shaped-beam fixing pipes, consider piping thermal expansion and contraction and seismic occurrence of such abnormalities, do not bundle too tight, fit piping route construction. 1-4-6.Vibration of piping may be affected by the occasion, to be joined with t
25、he support structures and piping vibration cushioning material.1-4-7.Fixed piping, must take into account the future needs, to reserve space.1-4-8.Outdoor piping and corrosion protection of buried piping shall be in the strategy. (Especially when buried piping shall be discussed in detail with exper
26、ts)1-4-9 General plumbing fixed settings in the following figure:1-4-10 Piping should be considered material even when fixed, corrosion properties selected are compatible.1-4-11 Support when under the influence of vibration of piping, shall be in the policy response. (Reference design)1-4-12 Support
27、 the manufacture must be taken according to the rules of semiconductors, avoid superficial injuries.1-4-13 Pipe support materials must also ban oil, wipe with alcohol before Assembly.2.Bends tubing specifications2-1 Pipe bending operation should pay attention to two principles:2-1-1 Surface at both
28、ends, from the short side first and begin to bend.半导体知识厂务讲座 (HOOK UP 简介) 22Mark will be relatively short length tubing, this section should be placed in the Bender The left, Set The second place. Bent Latch fixed Pipe, slide the tubing to the top, rotate 90 to complete bends. Piping the scars from a
29、bove have the following.LatchParts of the scarsBendingSome scarsBetween the two scars, Scars to pay special attention to. Section at the end of tubing, Swage Lok joint rings will produce 100%Leak problems. Latch scars will not occur to some circles this kind of problem. 2-1-2. Ends of side bend 180
30、(r- bend), must be 180 bending operations. This time,r mark bending dimensions in the plumbing, and this deal Bender left to Set . 2-2 Pipe bend of the actual2-2-1. 90 bend*Mark size, Set Bender Is to the left (for example, when you start bending some)1.Link Stop pim Pressed, as a reference point. 2
31、.Dash and marking pipe Link Mark superimposed on 90 And then use the Latch Fix. 3.Shoe handle 0 Fore Handle 0 Agree together. 4.Shoe handle Rotate to Fore handle 90 Wire, bend the pipe. 半导体知识厂务讲座 (HOOK UP 简介) 235. Score To check if there is at right angles. *Mark size, Set Bender Right sideDistribut
32、ion mark crossed and Link Mark R Fit, like any other order. 2-2-2. 180 (r- bend)1.Line size of the distribution mark, set in the Bender The left side. 2.Dash and Link 90 Fit. 3. Shoe Handle Fore Handle 0 Points will be Shoe Handle Fore Handle 180 Wire bending. 4. 90 Bent the same way, Sus Pipe bendi
33、ng Spring Back , So bending can bend quite a bit. 2-2-3 Bending45 1.Mark dash, placed either on the left or right can be. Distribution line Link 45 joint. 2. Shoe Handle Fore Handle 0 Points will be Shoe Handle Bending to Fore Handle 45 Line. 3.Correcting a bending angle.2-2-4. 45 bend1.Underlined t
34、he size of the mark, either placed in the Bender Left, right, are both available. Will Link the above scale is divided into 0-45 , the angle value in purpose be underlined. 2. Shoe Handle Fore Handle 0 , And then Shoe Handle 0 Bending to Fore Handle Scale 30 Quite a line. 半导体知识厂务讲座 (HOOK UP 简介) 243.
35、Correcting a bending angle.2-2-5. 45 -75 bends1.Underlined the size of the mark, either placed in the Bender Left, right, are both available. Link Shang 45-R , and r as a 90 equal, then use an underscore to make solving the angle value. 2. Shoe Handle Fore Handle 0 Points will be Shoe Handle Bending
36、 to Fore Handle Solving the point value on the scale. 3.Correcting a with the angles.2-2-6. 75 -89 bendsUse formal procedures to be curved 90 Using Vice Distribution point back to ask for. 4589 Desire among the bending angle is more difficult at design time, select this angle should be avoided. 3. P
37、ipe cutting and milling surfaces3-1 Large diameter pipes1.In principle should cut clean booths within the implementation. But if a customers clean room completed, can be cut in his clean room. (But if cutting produces chips, not in the clean room implementation of the occasion)2 Should confirm that
38、no harmful traces on the surface of piping before cutting or destroy it.3. Piping must be used when cutting stainless steel laser cutting machine (STAINLESS STEEL TUBE CUTTER) slowly cutting, keep the sections 半导体知识厂务讲座 (HOOK UP 简介) 25at right angles (90 0.5). 4 Should cross into horizontal fixed in
39、 principle, prevent chips from entering the tube.5. Pipe after cutting is required to AIR GUN with clean gas scavenging, cut face should be in the downstream direction. 6. After cutting the tube attached to the chip or other impurities, dust-free cloth should be used (LINT-FREE CLOTH) to clean. 7 Sp
40、ecial section of the processing application is processed after cutting sections.8 Cut processing, in order to prevent chips from entering the tube, should place the machined surface in nasty, washed clean gas from the upper class. After processing, cut-side down, knock a few times from above, removi
41、ng impurities of chip.9. Cut the processing end, confirm that the section dealing with good. If checked, using high purity industrial Ar gas removal pipes appearance. 10 Such as Canal and no impurities or anomalies, in stamped on both ends.11 If not cutting, decentralized across levels of piping tub
42、es cannot be used.3-2 Small-diameter piping ( 1/4“1/2“ )1.Guarantee Cutter Vertically with the pipes, so as not to damage the blades. 2.An entry must not be too deep, or you will make incisions into the oval and damage Cutter, Handle rotation angle 30 Can be. When you start 半导体知识厂务讲座 (HOOK UP 简介) 26
43、cutting must be rotated before and after 3-4 a half weeks, to ensure that the ports on the same level. 3.Cutting is completed, while checking the incision, to tilt the pipe, read from bottom to top, attached to prevent chips from getting holes in it.4.View cut off diameter shall not give rise to a s
44、piral scratch.5.After the cut is completed, formation of the cone-shaped cut and raw edges using end-face finishing cut, to form a flat surface in order to facilitate welding:End machines never feed too much at one time or speed is too fast, so as to avoid port oxidation due to overheating.Ensure th
45、at the pipe and port into a vertical position.Chamfer in addition to Flash, chamfering device perpendicular to the port, pipe inclined downwards to prevent filings entering the tube.Note: piping modifications, the cut should be avoided and must be used when cutting large flow Ar Rush blows. 4.Instal
46、lation of pipe joints4-1 COMPRESSION TYPE1“ The following dimensions)1. COMPRESSION TYPEJoining, usually shown in the following figure.2 Installation procedures, implemented according to the following steps.TUBETube is inserted into an interface, determine the pipe firmly 半导体知识厂务讲座 (HOOK UP 简介) 27em
47、bedded in the interface, and then to embedding degree mark.In order to determine the interface, TUBE Pipes together, and slowly loosen the screw cap, confirmed TUBE Pipe metal ferrule is inserted correctly before and after. TUBEWhen the tube within the interface, with a special spanner tighten until
48、 finger tight ( FINGER TIGHT ), Set this point as the screw starting point, mark. Interface with a special spanner fixed, rotate the screw cap 1 1/4 Times. After installation, using Special Inspector to check the gap between the screw and the.4-2 METAL GASKET TYPE1.METAL GASKET TYPEInterface structure is as follows.2 Installation procedure according to the following stepsBecause after piping connection cannot be corrected, must be assembled before the match point is correct.GASKET GASKET RETAINER Fitted body GLAND But
