1、AG-610 金屬快速退火爐能力考核表 簡介系統及 tuner？System overviewWhat is a pyrometer.What is a thermocoupleWhy overheat indicator red led is litWhat is a recipe？(define intensity ramp steady state) .What is a overshoot？How to change the variables to reduce an overshoot.What is a undershoot？How to change the variables
2、 to reduce an undershoot.What is a oscillation？. How to change the variables to reduce an oscillation機台工作限度(溫度、時間) 熱製程知識？說明爐管和 RTP 的不同？What is a implant annealing？.What is a oxidation？. What is a metalization？What is a glass reflow？ 製程汙染概念？本機台做何種製程？本機台可進何種材料？ 使用前做那些檢查？Chiller 水位？Chiller 水裝填冷卻水流量？氣體壓力？Purge flow meter 晶片裝卸流程操作？裝卸注意事項取出 wafer 時機 operation overview？.Screen diagram？.How to load a recipe？.How to modify a Recipe？.How to set frequency？How to run a Recipe？. How to access the aux recipe.製程的監控方式？操作流程緊急狀況操作程序Where is a power breaker. 完成後流程操作？登記簿放置位置？機台登記簿狀況填寫？
