1、关于溅射阴极与工艺的分析报告 (For Surfacility成都研修班)Gencoa 工艺工程师黄汉乐 (Hugo Huang) 2016-10-22GENCOA Key Company Facts GENCOA is a private limited company (Ltd) 成立于 1995 by Dr Dermot Monaghan 公司位于英国利物浦GENCOA是一个专业做阴极，离子源，以及speedflo的公司GENCOA目前员工38人（是目前全世界专业只做阴极配件最多人的公司）6 design (Creo 3D CAD)8 process development & simu
2、lation14 assembly & test4 sales & tech support (2 Asia based) 其中Hugo是亚洲的工艺/产品工程师3 administration & accounts3 hardware & software (Speedflo) 全球销售阴极数量达3000多个 全球销售speedflo达1000台，在反应溅射控制市场占比95%以上GENCOA 2015年新建的工厂GENCOA新工厂将2016年3月20日落成。总占地面积为2600平方米包括设计部办公室，现代化组装厂以及R&D实验室Gencoa offer the following range
3、of products & process technology for the thin film industry developed over the last 20 yearsPlanar MagnetronsRotatable MagnetronsPulsed Effusion CellsReactive Gas ControlPlasma Pre-Treaters磁控溅射的阴极类型按形状分：平面圆形阴极，主要是实验室研发设备。平面矩形阴极，主要是生产设备（任意长度）。靶材旋转圆柱阴极，主要是大中型生产设备（长度+30 voltsGencoa Active Anodes for pl
4、asma control and long term stability for DC and DC pulsed rotatable magnetronsGencoas active anodes can be fitted to any rotatable magnetron system. The arrangement suits a dual rotatable, but they can also be utilized with single rotatable magnetrons.Reduces the resistivity of ITO layers (low damag
5、e ITO at room temperature)Allows pulsed DC reactive oxide deposition as opposed to AC power increases rate and uniformity, lowers costLimits plasma interaction and heating of the substratesReduces long-term process and uniformity driftGencoa Planar Magnetrons - Dual magnetron assemblies for a variety of applications
