1、c8 c 8 ; ; 黄元庆 叶艺文 梅荣华(厦门大学新技术开发研究所,厦门 361005)4 1 : W % 8 ; ; - aS = # 0 W 8 ; ; q b1 o M : 8 , ; , ; Semiconductor blue lasersH uang YuanqingYe YiwenMei Ronghua( Instit ut e of New Technology, Xiamen Universit y, Xiamen361005)Abstract: In this paper, w e review the current st atus and the recent pr
2、ogress of semiconductor blue lasers. Andw e discuss t he challengs and prospects of the quant um -well sem iconductor blue lasers.Key words: semiconductor, blue light , lasersnull1 应用前景 8 ; , 8 l a p a a V , au a_ as aD a; i% Z X W b t M ,; i% X , V s v i% “ d , T n % Z E b W ; i% ; = 5 ; = )5 g r-
3、26% , Q ; Y ;= 5 b “ - , ? ; _ i% . q Z _ ? Z b B Z 1 p 8 ; A B 4 q ; , 6 B Z 1 p ; o bC ; 8 ; , o B 780nm 830nm W , oK ? ; B ? Z b T ; o V w _ ; o, ; o 430nm, * i% | VC 4 by o ,; l ,i% vb “ - L C ; ; o l % ; ; , “ 8 ; ; , = : B SHG E 3 ; ; , d L 8 ; ; 6 B q ; ; b q9 ( ) b K S M X w KNbO3 T 8 , 8 ;
4、, 430nma10mW ; ; ( “ - B B % ; ; )b q - ; B “ , i 8 vaN L bA 8 ; ; q V 9 i% 9 1 , ? H i% / iP z b ; 8 ; l ; ,5 g vb ; q ?| i% z M q , V P ; ? vv4 , 7 g bN , 8 ; ; A | B ; u ? by ; V ; 1u ; v1997 M 18 4 LASER JOU RNAL( Vol. 18, No 4. 1997)null 1996 M 10 7 l o , P F y bC P o 8 ; 5 , V 8 ; ; 4 B ? Z b2
5、 器件的进展 8 ; ; . v g ,9 N $ p,V 7 w q T Z b M , S E q $ a a Z S v T , i | v T b1 ; ; ? , 1 ? 450nmj500nm W ; ; , 8 ? z A 2. 6eV ,C “ jV B 8 B ; ? ; ,7 jB 8 z , ? V n ; uS ? , . r q b jB i 5 5 , E % by N , 70 M ,jB 8 5 b80 M , S 7 S s 0 d 3 E 3 jB s 8 b 8 ; ; ? | Z , 1 80 M ,jB , 0 W T | l Z , O B J 3
6、e Z 9 | 1 Z byN , C 8 o 0 W p E M C K v Q b N $ , 1991 M S 3M M . A. Haase n Q ZnCdSe/ ZnSe 8 ; , 77K / o 490nm ; , / o M 502nm, ; o ; ? Z B 1 b1992 M D 9 o 447nm ZnSe/ ZnM gSSe 8 ; ; , T 77K, ( 1)bK v 9 M 8 ; ; , S a # S + i + v b # 0 W 9 V 0 W , 9 0 T bYV s V o T B e b O 0 W ; 1 0 W 9 m , by N , ;
7、 v 0 W b 0 W ; T , GaAs GaAs (9 ZnSe T ) , s 0 E 3 jB , ZnMgSSe ; aZnSSe o u # B 1j3 3 ; 9 m ZnCdSe 0 W , m 1 U b ZnSSe s GaAs , 7 M gaS s V P # M , i P GaAs b 0 W ) M / bm 1 , E ( , p Zn( Se, Te) M ( b M ( “ - %= x ( B z ( E b M ( 8 ( E q 410- 4nullcm- 2, 1 vB ) b ( E v,5 4 = 5 , 7 5 q p 1 y B b (
8、E ,9 8 ; ; q % B / 5 bC i / o ; q X 250A/ cm2, 5V ) b ; , Z T , ; , bE S D. Herve 0 6 , Zn1- XCdXSe/ ZnSe s ; , i 83Kj225K W , 478nm o ; ; , p V + l H ( 2)b; , T 9 7 Z ,9 ; ; ( 3)b ; 8 “ Y Z _ 8 ? ; , B 8 V ? ; , VCSEL 8 , m 2 U b ; / Z ( Q V , Q V V S s Q , . ; 8 b B ; z + nullmj20nullm, V S “ ; ,
9、3 q 8 ; ; b v H. Jeon ;, 8 V ? ; , T = 200Ka o H , X ( q 1mW 2 u ; v1997 M 18 4 LASER JOURNAL( Vol. 18, No 4. 1997)496nm o ; ; , / r q 22%( 4)bm 1jB ; ? o , ZCdSe 0 W u p n ZnSSe; o bm 2 a/ Z Q 8 V ? ; b T ; 8 b3 存在问题和展望“ - 8 ; ; “ 1 % 1 5 4 q p q, # T o b 8 ; ; ? / , i H q/ H , p K 9 + l H , q9 r L
10、 b P q 3 | 1 y 8 J , J 1 1 J a p J b t J ; 9 m u 3 d b r P u9 m / , . P s ? b J id 3 T V % ,7 T T b 9 K q p 1 o/ B b q = L J u, e ? ( , 3? by N , , L C = l x ( , A 1 % 5 ( 6)b9 ,1 L C ? i / o 8 ; ; q L ,A 1 S a q T B , be z # jB + , 1 y t Q b V | V b 8 ; q L C l ; ; , P B K il / L , S E % “ 4 by N ,
11、 | , 8 ; ; qA | L , A | 3 v 6 rm rm b I Dq1rK. Akim oto, H. Okuyama, et al. , Grow th of Zn-MgSSe and fabrication of blue laser diodes.Physica B 191: 1-2, September, 1995, 45.q2rD Herve, R Accomo, et al. , M icrogun-pumpedblue lasers. Applied Physics Letters. 67: 15,Oct. 9, 1995, 2144-2146.q3rPD Flo
12、yd, JL Merz, et al. , Optically pumpedCdZnSe/ ZnSe blue-green vertical cavity surfaceemitting lasers. Applied Physics Letters, 66:(/ 10 : )3u ; v1997 M 18 4 LASER JOU RNAL( Vol. 18, No 4. 1997)7 结束语 d 8 9 v 8 , 4 q, ( s d ; 1 , ? “ / , ? 9 v,; M b * d 8 z ) ; ? N d 8 r ; ? 1 ; , N b ( 1) T , ; V qa
13、; o ; % b B ; ,o V In b q4 ,; / ,1 4 , d 8 r , T / , r b # ? o . Z ; ( ; j ? ) M ) d 8 ; 5 b d 8 ; ; N 1 N H 5 9 4 b A ? s B Z E , ; z l . Z , ? ? 86%S = o b 5 n 1 Z E , ; 8 m b K , A d s 9 l d L 4 b I Dq1rISO/ TC 172/ SC 9/ WGI N80 ISO/ DIS 11146.Optics and optical instruments, laser and laserrelat
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15、 press, 1980. P416q5rU . Wittrock, S. Dong, H. Weber Beam Parameterproducts of Unst able Resonat ors, SPIE Vol,1995, 2375: 172-183q6rJ. Durnim, J. M iceli Jr and J. H. Eberly Diffrac-tion - free Beam, Physical Review Letters 1987158( 15) : 1499q7rP. Sprangle. Comment on Nondiffracting Beams,Phys. Re
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17、i, SPIE , 1995, 2375: 192-200q12rM. Scholl, G. Herziger. Kurt osis as a tool pa-rameter for laser w elding, SPIE , 1995, 2375:130-141( 3 : )22, M ay 29, 1995, 2929-2931.q4rH Jeom, V Kozlov, et al. , Room-tem perature op-tically pumped blue-green vertical surface emit -ting laser. Applied Physics Let
18、ters, 67: 12, Sep.18, 1995, 1668-1670q5rLA Kolodziezski, KL Gunshor, AV Numikko,Wide-bandgap - heterostructure for bluegreen opt ical sources: Key materials issues.Anuual Review of Materials Science, 25, 1995,711-753.q6rH Luo, JK Furdyma. T he - semiconductorblue-green laser: Challenges and solut ions. Semi-conductor Science and Technology, 10: 8,Aug. 1995, 1041-1048.T e : i, 3 , 47 b b1976 M 8 v ; bC V Y ; q, ; N buWLM -5 vo CO2 ; 8 b10 u ; v1997 M 18 4 LASER JOURNAL( Vol. 18, No 4. 1997)
