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类型传感器与智能时代 (13).pdf

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    1、 41 4 2020 4 C h i ne seJournalofS ci e nti f i cInstrume ntVol.41 No.4Apr 2020DOI 10.19650/j cnki cj si J2006217 2020-03-26 e ce i ve dDate 2020-03-26*61527813*。PI。0.82%。0.9999。TP212 TH 701 A 460.4020 es ear ch o n t h e det ect io n m et h o d o f t h e n o n lin ear m ag n et ic im p edan ce s en

    2、 s o r GuoDazh e W e n Yume i LiPi ng W ang Yao Schoolof Elect r onic Infor m at ion and Elect r ic Eng ineer ing Shang hai Jiao TongUniv er s it y Shang hai 200240 China A bs t r act Th emagne to-i mpe d ancee f f e ct h as th ee ve n-ord e r nonl i ne ari ty To sol veth i s probl e m a se l f-bal

    3、ance dd e te cti on me th odi spropose d B yappl y i ng AC bi as f i e l dandusi ng ph asese nsi ti ved e te cti on th eoutput ofse nsor h as th ef e atureofod dsy mme try Th ed i re cti on ofe xte rnalf i e l dcan bed e te cte dwi th out DC bi as Th e n aproporti onal-i nte gral PI control l e ri s

    4、uti l i ze dtof orm acl ose d-l oopd e te cti on sy ste m W h e n th esy ste m re ach e sth este ad ystate th ef e e d back f i e l dandth ee xte rnalf i e l darecounte racte dwi the achoth e r Andth e se l f-bal ance dd e te cti on wi l lbe i mpl e me nte d In th i s way th e nonl i ne ari tyof th

    5、e se nsor i s e l i mi nate d Expe ri me nts arei mpl e me nte don a th i n-f i l m-i nd ucti vemagne ti c se nsor e sul ts sh ow th at th eoutput ofth ese l f-bal ance dd e te cti on me th odh as goodl i ne ari ty andth enonl i ne ari tyi s onl y0.82%Th eme asure me nt rangei s e nl arge dd oubl e

    6、Eve n und e r d i f f e re nt AC bi as th eoutputch aracte ri sti csi sconsi ste nt andth ecorre l ati on coe f f i ci e nts areal ll arge r th an 0.999 9 Th ese l f-bal ance dd e te cti on wi thAC bi as i ssui tabl ef oral lnonl i ne armagne ti cse nsors Di f f e re nt ki nd sofnonl i ne arch aract

    7、e ri sti ccan bee l i mi nate dbyth epropose dme th odandth eh i gh-l i ne aroutput can beach i e ve d Key w o r ds magne ti cse nsor magne to-i mpe d ancee f f e ct e ve n-ord e rnonl i ne ari ty AC bi as se l f-bal ance dd e te cti on0 1-2、3-4、5、。、H 6-7 magne to i mpe d ance M I。M I。4 25 8-9。8 C o

    8、Fe B S i 6Oe 2 Oe 748 mV/Oe 0.98%。9 500 T 2.5 Oe 200 mV/Oe 0.48%。1 0。2、10-11。12-14 M I。15。16-17 10 pT。18。1 19 20。1。、。1 Fi g 1 Th ebl ock d i agram ofth eope n-l oop d e te cti on sy ste m Iex Use n。Iex=I0cos 0t Ibi as=Ibcos 1t Hbi as=Hbcos 1t 1 0 Z=Z H=H。He Hbi as H=He+Hbcos 1t。Use n=I0Z He+Hbcos 1t

    9、 cos 0t+He+Hbcos 1t 1 1 Use n Um=I0 Z He+Hbcos 1t。Z He Um 2 A2i Z H 2i。Um=I0 i=0A2i 2i He+Hbcos 1t 2i=I0 i=0 2ik=0 A2iHkbk H2i ke 2i k cosk 1t 2 cosk 1t 3 cosk 1t=12k 1 cos k 1t+C1kcos k 2 1t+Ck 12kcos 1t k 12k 1 cos k 1t+C1kcos k 2 1t+Ck2k k 3 3 k cosk 1t cos 1t。2 UmHe Um 4 Um I0 N1 He cos 1t+N2 He

    10、 cos 2 1t 4 N1 He N2 He。1 Use n26 4 1。1 2 Ure f 1=U1cos 0t。2 Fi g 2 Th ebl ock d i agram ofth eq uad ratured e te ctor 2 Gc。UIH UQH。UIH=12GcU0Um cos H+cos 2 0t+H UQH=12GcU0Um si n H+si n 2 0t+H 5 1 0 Umcos 2 0t+H Umsi n 2 0t+H 2 0 1 2 0 UI UQ。UI=12GcU0Umcos H UQ=12GcU0Umsi n H 6 Ude1。Ude1=U2I+U2槡 Q=

    11、12GcU0N1 He cos 1t 7 1 Ur ef2=U2cos 1t Ude1 8。Uope n_ out=14GcU0U1N1 He 8。N1 He He Uope n_ out He。2 PI V-I。3 If、He Uou t GVI 0 GIH 0 PI PI s=KP+KI 1s KP KI KP 0 KI 0。3 Fi g 3 Th econtrolconstructi on ofth ese l f-bal ance dcl ose d-l oopd e te cti on sy ste m Gse n s 9 Uout s He s=Gse n s KI+Gse n s

    12、 KPs Gse nGVIGIHKI+1+Gse nGVIGIHKP s 9 He s=Hi ns 9 u out 10。u ou t=l i m s 0s He s Gse n s KI+Gse n s KPs Gse n s GVIGIHKI+1+Gse nGVIGIHKP s=1GVIGIHHi n 10 10 Hf=u out GVIGIH=Hi n。、。9 10。e x e x x=Sen x x=Sen x。3 11、12 Uout=KP x+KIx 11 e=He GVIGIHUout 12 12 11 e=GVIGIH KPSen e e+KISen e 13 Sen e Se

    13、n e。4 27 e=GVIGIHKISen e 1+GVIGIHKPSen e 14 e 0 e Sen e 0。Sen e e 0 e Sen e 0 13 e=0 e=0 e=0。V e=e2 15 V e=2e e=2eGVIGIHKISen e 1+GVIGIHKPSen e 15 Sen e 0 V e 0。e Sen e 0 Sen e mi n=s 0 0。GVI GIH KP 0 GVIGIHKP 1s 1+GVIGIHKPSen e 0 V e 0。e Sen e 0 e 0 V e 0。e=0 He Hf。e Sen e 0 e 0。Sen e e Sen e 0 e S

    14、en e 0 Hm Hm。8 Gc Hm Hm Hm Hm。4。PI V-I PI。4 Fi g 4 Th esch e mati cd i agram ofth ecl ose d-l oop d e te cti on sy ste m 4。PI、KP=CP1CP2 KI=1 P1CP2。V-I PI Uf T1=T2=T3=T4 Uf If GVI=1 0 If=1 0Uf。3 3.1 21-23。5 a b。28 4 1 5 Fi g5 Th ee q ui val e nt ci rcui t andph otographofth eth i n-f i l mse nsor r 1

    15、 L1 r 2 L2。23。6 500 kH z 25 mA。20 Oe/A He=20 I。6 Fi g 6 C h aracte ri sti ccurveofth eth i n-f i l m se nsor 6。If Hf 16 If mA Hf Oe Hf=GIHIf 0 15If 16 M FLI。500 kH z 25 mA。50 mA、30 mA、20 mA 1 kH z 7.5、4.5、3 Oe。7。7.5、4.5、3 Oe 6Oe 6Oe、3 Oe 3 Oe、2 Oe 2 Oe 6.6%、5.6%、3.2%。7 Fi g 7 Th eoutput ch aracte ri

    16、 sti ccurveofth ecl ose d-l oop sy ste m e Sen e 0 e 0。3.2 8 Sen e 0 1+GVIGIHKP Sen e mi n 0 GVI GIH KP GVIGIHKP 1 Sen e mi n 17 8 Sen e。5.12 0 GVIGIHKP 0.195。16。GIH=0.15 0=30 GVI=130 CP1=10 F CP2=4.7 F KP=2.13 P1=3 k KI=70.9。10 4 29 8 Fi g 8 Th ed e ri vati vecurve softh eoutput curve sofope n-l oo

    17、p sy ste m 200 mV/Oe。V-I 70 mA 10.5 Oe 10 Oe 9。10 Oe。0.9999。Uou t=0.2073He+0.05759 0.82%。9 Fi g 9 Th eoutput ch aracte ri sti ccurveofth ecl ose d-l oop sy ste m 0.1 A/s。10。PI。10 Fi g 10 Th ed y nami cre sponsecurveofth ecl ose d-l oop sy ste m 1 s。4。PI V-I。0.82%。1 s。1 J 2019 40 3 47-53 S H I G LI X

    18、 S H W ANG ZH e t al e se arch oncorre cti ng output atti tud e i nf ormati on of magne ti c se n-sor J C h i ne seJournalofS ci e nti f i c Instrume nt 2019 40 3 47-53 2 J 2017 30 4 1 38 2 402-407 S H IG LI X S H LI X F e t al Eq ui val e nt two-ste pal gori th m f orth ecal i brati on ofth re e-ax

    19、i smagne ti c se nsori n h e ad i ng me asure me nt sy ste m J C h i ne seJournalofS ci e nti f i cInstrume nt 2017 38 2 402-407 3 ADAC H I Y OYAM A D TE AZONO Y e t al C al i brati on ofroom te mpe raturemagne ti c se nsorarrayf orbi omagne ti c me asure me nt J IEEE Transacti ons onM agne ti cs 20

    20、19 55 7 1-6 4 EE M ANN J DU DAUT P S ALZE S e t al Eval uati on of magne toe l e ctri c se nsor sy ste ms f orcard i ol ogi calappl i cati ons J M e asure me nt 2018 116 230-238 5 J 2017 31 11 1719-1724 ZH ANG N W ANG SS H LIH M agne ti ctarge t l ocati one rror anal y si s andcorre cti on J Journal

    21、ofEl e ctroni cM e asure me nt and Instrume ntati on 2017 31 11 1719-1724 6 PANINA L V M OH I K M agne to-i mpe d ancee f f e ct i namorph ous wi re s J Appl i e dPh y si cs Le tte rs 1994 65 9 1189-1191 7 B EAC H S B E KOW ITZ A E Gi ant magne ti c f i e l dd e pe nd e nt i mpe d ance of amorph ous

    22、 Fe C oS i B wi re J Appl i e dPh y si csLe tte rs 1994 64 26 3652-3654 8 GM I J 2014 36 2 181-185 NIE X H PAN ZH M ZH ANG W N e t al Gi antmagne toi mpe d ance GM I magne ti c se nsor base d Onorth ogonall ock-i n d i f f e re nti alampl i f i e r J JournalofNati onalUni ve rsi tyofDe f e nseTe ch

    23、nol ogy 2014 36 2 181-185 9 YU G B U X YANG B e t al Di f f e re nti al-ty peGM Imagne ti c se nsor base d on l ongi tud i nale xci tati on J IEEE S e nsorsJournal 2011 11 10 2273-2278 10 NAB IASJ AS FOU A YONNET J P Te mpe ratured e pe nd e nceof gi ant magne to i mpe d ance i n amorph ousmi crowi

    24、re sf orse nsorappl i cati on J IEEE Transacti onson M agne ti cs 2017 53 4 1-5 11 NAB IASJ AS FOU A YONNET J P Th ei mpact ofbe nd i ng stre ss on th e pe rf ormance of gi ant magne to-i mpe d ance GM I magne ti cse nsors J S e nsors 2017 17 3 640-650 12 M AKH NOVS KIY D P PANINA L V M APPSD J Fi e

    25、 l d-d e pe nd e nt surf acei mpe d ancete nsor i n amorph ouswi re swi thtwo ty pe sofmagne ti c ani sotropy H e l i calandci rcumf e re nti al J Ph y si cal e vi e w B 2001 63 14 144424-144441 13 KANNO T M OH IK YAGIT e t al Amorph ouswi reM Imi crose nsorusi ng C-M OSIC mul ti vi brator J IEEETra

    26、nsacti onson M agne ti cs 1997 33 5 3358-3360 14 C AIC M M OH I K H ONKU A Y e t al Improve dpul secarri e rM Ie f f e ct byf l ashanne alofamorph ouswi re sandFM wi re l e ss C M OSIC torq ue se nsor J IEEETransacti onsOn M agne ti cs 2001 37 4 2038-2041 15 S ILVA E C GUS M AO L A P B A B OS A C H

    27、e t al H i gh se nsi ti vi ty gi ant magne to i mpe d ance GM I magne ti c transd uce r M agni tud e ve rsus ph ase se ns-i ng J M e asure me nt S ci e nce and Te ch nol ogy 2011 22 3 35204-35212 16 UC H IYAM A T M OH IK H ONKU A Y e t al e ce ntad vance s of pi co-te sl a re sol uti on magne to-i m

    28、pe d ancese nsorbase don amorph ouswi reC M OS-IC M Ise nsor J IEEE Transacti ons on M agne ti cs 2012 48 11 3833-3839 17 TAKIYA T UC H IYAM A T De ve l opme nt of acti vesh i e l d i ng-ty pe M I grad i ome te r and appl i cati on f orM age tocard i ograph y J IEEE Transacti ons onM agne ti cs 2017

    29、 53 11 1-4 18 DING L S AEZ S DOLAB DJAN C e t al Intri nsi cgi antmagne toi mpe d ance noi se re d ucti on byDC bi as J S e nsorLe tte rs 2007 5 1 176-179 19 J 2018 32 3 163-169 XU W XU K J W ANG C H C H e t al Di gi tale l e ctromagne ti c vorte x f l owme te r base d on constantmagne ti c f i e l d J Journalof El e ctroni c M e asure me ntandInstrume ntati on 2018 32 3 163-169 20 J 2019 40 1 85-91 W ANG Y ZH JI C H LI J S H e t al De si gn of

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