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MEMS_IMU介绍.ppt

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1、IMU,1,MicroElectroMechanical Systems (MEMS) Inertial Measurement Unit (IMU),Attitude relative to gravity vector Magnetic heading Rotational velocity Translational acceleration,IMU,2,Absolute rotational attitude of object Direct measurement of angular velocity Direct measurement of translational acce

2、leration,Positives,IMU,3,Does not provide absolute location translational velocity rotational acceleration Data communication Medium resolution 150 Hz,Negatives,IMU,4,Vehicle navigation Intercontinental ballistic missiles (ICBM) Nuclear submarines Cruise missiles MEMS Automotive Consumer products,Hi

3、story of IMUs,IMU,5,Automotive Accelerometers to deploy airbags Vehicle roll handling,MEMS IMUs - Automotive,IMU,6,Games (WiiMote) PDA (iPhone) Camera stabilization Hard disks,MEMS IMUs Consumer Products,IMU,7,MEMS Fabrication,IMU,8,acceleration,gravity,MEMS accelerometer (proof mass),IMU,9,MEMS Com

4、b Sensor/Drive,IMU,10,MEMS Differential Capacitance,IMU,11,MEMS Differential Capacitance,IMU,12,MEMS accelerometer,IMU,13,MEMS gyro (torsion),IMU,14,MEMS gyro (planar),IMU,15,MEMS magnetometer (magnetoresistive),IMU,16,Signal Analog voltage (0 to 3V) Fixed frequency, variable duty cycle Digital (int

5、ernal A/D converter) Nominal Bandwidth 550 Hz for accelerometer 150 Hz for gyro 50 Hz for magnetometer,MEMS IMU Outputs,IMU,17,Biaxial accelerometer Uniaxial gyro,Two-Dimensional (2D) IMU,IMU,18,Triaxial accelerometer Triaxial gyro Triaxial magnetometer Required to determine spin about gravity vecto

6、r,Three-Dimensional (3D) IMU,IMU,19,Triaxial accelerometer 3g, 300 mV/g, 550 Hz Triaxial gyro 300 deg/sec (dps), 3.3mV/dps, 140 Hz Triaxial magnetometer 50 Hz On-board CPU, serial I/O,9DOF Board Sparkfun,MEMS IMU,20,Triaxial accelerometer 2g, 4g, 8g and 16g Triaxial gyro 250, 500, 1000, and 2000dps Triaxial compass On-board motion fusion, I2C serial,9DOF Chip Invensense MPU-9150,

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