1、CMOS VLSI Design,延 边 大 学 工 学 院电 子 信 息 通 信 学 科许 一 男,Introduction,Integrated circuits: many transistors on one chip. Very Large Scale Integration (VLSI): very many Complementary Metal Oxide Semiconductor Fast, cheap, low power transistors Today: How to build your own simple CMOS chip CMOS transistors
2、Building logic gates from transistors Transistor layout and fabrication Rest of the course: How to build a good CMOS chip,Silicon Lattice,Transistors are built on a silicon substrate Silicon is a Group IV material Forms crystal lattice with bonds to four neighbors,Dopants,Silicon is a semiconductor
3、Pure silicon has no free carriers and conducts poorly Adding dopants increases the conductivity Group V: extra electron (n-type) Group III: missing electron, called hole (p-type),p-n Junctions,A junction between p-type and n-type semiconductor forms a diode. Current flows only in one direction,nMOS
4、Transistor,Four terminals: gate, source, drain, body Gate oxide body stack looks like a capacitor Gate and body are conductors SiO2 (oxide) is a very good insulator Called metal oxide semiconductor (MOS) capacitor Even though gate is no longer made of metal,nMOS Operation,Body is commonly tied to gr
5、ound (0 V) When the gate is at a low voltage: P-type body is at low voltage Source-body and drain-body diodes are OFF No current flows, transistor is OFF,nMOS Operation Cont.,When the gate is at a high voltage: Positive charge on gate of MOS capacitor Negative charge attracted to body Inverts a chan
6、nel under gate to n-type Now current can flow through n-type silicon from source through channel to drain, transistor is ON,pMOS Transistor,Similar, but doping and voltages reversed Body tied to high voltage (VDD) Gate low: transistor ON Gate high: transistor OFF Bubble indicates inverted behavior,P
7、ower Supply Voltage,GND = 0 V In 1980s, VDD = 5V VDD has decreased in modern processes High VDD would damage modern tiny transistors Lower VDD saves power VDD = 3.3, 2.5, 1.8, 1.5, 1.2, 1.0, ,Transistors as Switches,We can view MOS transistors as electrically controlled switches Voltage at gate cont
8、rols path from source to drain,CMOS Inverter,CMOS Inverter,CMOS Inverter,CMOS NAND Gate,CMOS NAND Gate,CMOS NAND Gate,CMOS NAND Gate,CMOS NAND Gate,CMOS NOR Gate,3-input NAND Gate,Y pulls low if ALL inputs are 1 Y pulls high if ANY input is 0,3-input NAND Gate,Y pulls low if ALL inputs are 1 Y pulls
9、 high if ANY input is 0,CMOS Fabrication,CMOS transistors are fabricated on silicon wafer Lithography process similar to printing press On each step, different materials are deposited or etched Easiest to understand by viewing both top and cross-section of wafer in a simplified manufacturing process
10、,Inverter Cross-section,Typically use p-type substrate for nMOS transistors Requires n-well for body of pMOS transistors,Well and Substrate Taps,Substrate must be tied to GND and n-well to VDD Metal to lightly-doped semiconductor forms poor connection called Shottky Diode Use heavily doped well and
11、substrate contacts / taps,Inverter Mask Set,Transistors and wires are defined by masks Cross-section taken along dashed line,Detailed Mask Views,Six masks n-well Polysilicon n+ diffusion p+ diffusion Contact Metal,Fabrication Steps,Start with blank wafer Build inverter from the bottom up First step
12、will be to form the n-well Cover wafer with protective layer of SiO2 (oxide) Remove layer where n-well should be built Implant or diffuse n dopants into exposed wafer Strip off SiO2,Oxidation,Grow SiO2 on top of Si wafer 900 1200 C with H2O or O2 in oxidation furnace,Photoresist,Spin on photoresist
13、Photoresist is a light-sensitive organic polymer Softens where exposed to light,Lithography,Expose photoresist through n-well mask Strip off exposed photoresist,Etch,Etch oxide with hydrofluoric acid (HF) Seeps through skin and eats bone; nasty stuff! Only attacks oxide where resist has been exposed
14、,Strip Photoresist,Strip off remaining photoresist Use mixture of acids called piranah etch Necessary so resist doesnt melt in next step,n-well,n-well is formed with diffusion or ion implantation Diffusion Place wafer in furnace with arsenic gas Heat until As atoms diffuse into exposed Si Ion Implan
15、atation Blast wafer with beam of As ions Ions blocked by SiO2, only enter exposed Si,Strip Oxide,Strip off the remaining oxide using HF Back to bare wafer with n-well Subsequent steps involve similar series of steps,Polysilicon,Deposit very thin layer of gate oxide 20 (6-7 atomic layers) Chemical Va
16、por Deposition (CVD) of silicon layer Place wafer in furnace with Silane gas (SiH4) Forms many small crystals called polysilicon Heavily doped to be good conductor,Polysilicon Patterning,Use same lithography process to pattern polysilicon,Self-Aligned Process,Use oxide and masking to expose where n+
17、 dopants should be diffused or implanted N-diffusion forms nMOS source, drain, and n-well contact,N-diffusion,Pattern oxide and form n+ regions Self-aligned process where gate blocks diffusion Polysilicon is better than metal for self-aligned gates because it doesnt melt during later processing,N-di
18、ffusion cont.,Historically dopants were diffused Usually ion implantation today But regions are still called diffusion,N-diffusion cont.,Strip off oxide to complete patterning step,P-Diffusion,Similar set of steps form p+ diffusion regions for pMOS source and drain and substrate contact,Contacts,Now
19、 we need to wire together the devices Cover chip with thick field oxide Etch oxide where contact cuts are needed,Metalization,Sputter on aluminum over whole wafer Pattern to remove excess metal, leaving wires,Layout,Chips are specified with set of masks Minimum dimensions of masks determine transist
20、or size (and hence speed, cost, and power) Feature size f = distance between source and drain Set by minimum width of polysilicon Feature size improves 30% every 3 years or so Normalize for feature size when describing design rules Express rules in terms of l = f/2 E.g. l = 0.3 mm in 0.6 mm process,
21、Simplified Design Rules,Conservative rules to get you started,Inverter Layout,Transistor dimensions specified as Width / Length Minimum size is 4l / 2l, sometimes called 1 unit In f = 0.6 mm process, this is 1.2 mm wide, 0.6 mm long,Summary,MOS Transistors are stack of gate, oxide, silicon Can be viewed as electrically controlled switches Build logic gates out of switches Draw masks to specify layout of transistorsNow you know everything necessary to start designing schematics and layout for a simple chip!,
